The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:

• Thin-film integrated passives as an alternative to discrete passives
• The possibility of piezoelectric MEMS
• Solutions for MEMS gyroscopes
• Advanced interconnect technologies
• Ambient energy harvesting
• Bulk acoustic wave resonators
• Ultrasonic receiver arrays using MEMS sensors
• Optical MEMS-based spectrometers
• The integration of MEMS resonators with conventional circuitry
• A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns
• Wireless microactuators to enable implantable MEMS devices for drug delivery
• MEMS technologies for tactile sensing and actuation in robotics
• MEMS-based micro hot-plate devices
• Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring
• Sensors using passive acousto-electric devices in wired and wireless systems

Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.